Ngatitaurei nezvekukosha kwesilicon nitride (SiNx) mumachipisi kana nitride

Nei silicon nitride ichiita basa rakakosha mumachipisi? Ongorora mabhenefiti esilicon nitride uchienzaniswa nezvimwe zvigadzirwa.

Mukugadzira chip, pane chigadzirwa chinoita basa rakakosha, ndiyo silicon nitride (SiNx). Kunyangwe iyo inogona kusagamuchira iyo chaiyo kutariswa sezvimwe zvinonyanya kuzivikanwa semiconductor zvigadzirwa sesilicon (Uye), gallium arsenide (GaAs) kana gallium nitride (GaN), kukosha kwayo kunooneka. Mazhinji machipisi achashandisa chigadzirwa ichi.

1. Sei iri SiNx?

Shamwari dzepedyo dzakangwarira dzakaona kuti ndakashandisa SiNx pakugadzira kemikari formula yesilicon nitride.. Shamwari dzakanyatso tsvaga kemisitiri yechikoro chesekondari dzinofanirwa kuziva kuti N ndiyo yechishanu chikamu chikuru cheboka. Chaizvoizvo, valence inofanira kuva -3, nepo kemikari valence yesilicon iri +4. Iyo kemikari formula yesilicon nitride inoda kuve Si3N4. Ko ingava sei SiNx?

Chekutanga, ngatitaure nezve multivalent state ye nitrogen: nitrogen ine akawanda valence nyika, kunyanya nekuda kwekuti ine 5 valence maerekitironi, uye maatomu enitrogen anogona kugovera maerekitironi aya nenzira dzakasiyana. Nitrogen inogona kugadzira akasiyana valence nyika, iyo inonyanya kutsamira pahuwandu hwemaerekitironi inoratidza zvimwe zvikamu.

Nokuda kwenitrogen, iyo yakanyanya kusimba valence mamiriro ari -3, zvakadai se ammonia (NH3) uye gallium nitride (GaN). Zvakadaro, nitrogen inogona kuwedzera kuumba yakanaka valence nyika nekurasikirwa nemaerekitironi, zvakadai se +5 valence mamiriro mu nitric acid (HNO3). Pamusoro pazvo, nitrogen inogonawo kugadzira valence state pakati -3 uye +5, zvakadai se +3 valence mamiriro mu nitrous acid (HNO2) kana kuti +1 uye +2 valence inoti mune mamwe masikirwo emakomisheni.

Chechipiri, ngatikurukurei silicon nitride:

Mumusika we semiconductor, silicon nitride inoshandiswa mumashandisirwo akasiyana siyana kazhinji isiri-uniform, kazhinji inomiririrwa neSiNx. SiNx ndeye amorphous zvinhu zvine zvimiro zvinoenderana nereshiyo yenitrogen kune silicon, ndizvo, kukosha kwe x. Kana kukosha kwe x kugadzirisa, iyo yemuviri uye yemakemikari dzimba dzesilicon nitride ichachinja zvakare. Silicon nitride inouya mumarudzi akati wandei, inosanganisira Si3N4, Si2N2, SiN, zvichingoenda zvakadaro

Si3N4 chigadzirwa checrystalline, zvinoreva kuti silicon uye nitrogen ratio inogadziriswa. Kana kukosha kwe x kwakaenzana ne 4/3, SiNx yakaenzana neSi3N4. Zvakadaro, mumashandisirwo anoshanda, SiNx kazhinji isiri-uniform, uye iyo silicon uye nitrogen ratio inogona kudzorwa nekushandura zvakatemwa zvePVD kana CVD maitiro..

2. Ndeipi basa reSiNx mukugadzira chip?

Silicon nitride ine yakanakisa insulation yekugara zvivakwa, uye resistivity yayo inogona kuva yakakwirira se 10 ^ 14 Oh · cm, zvakanyanya kudarika zvimwe zvinojairwa kudzivirira zvigadzirwa sesilicon oxide (SiO2). Yayo yakaderera dielectric inogara inoita kuti ive yakakwana yekuviga layer mumicrowave uye RF application. Iyo silicon nitride layer inobatsirawo mukuvhara kupararira kwezvinosvibisa muchip. Inogona kudzivirira kubva kune dopants senge boron uye phosphorus kubva pakuchinja gadget maficha nekupararira. Pamusoro pe, inogona kuwedzera kudzivirira kupararira kweioni dzesimbi kudzivirira kukanganisa senge mapfupi maseketi.

Iyo yakasarudzika yekudziya kuchengetedzeka kwesilicon nitride inotemerwa neyakasarudzika makemikari zvivakwa uye crystal chimiro. Inogona kugara yakachengeteka munzvimbo yepamusoro-yekushisa pasina kuora kwemakemikari kana kugadziriswa kwechimiro chemuviri sezvimwe zvinhu. Imhaka yekuti mune yekristaro chimiro chesilicon nitride, atomu imwe neimwe yesilicon inosanganiswa nemaatomu mana enitrogen muchimiro che tetrahedron, uye atomu imwe neimwe yenitrogen inobatanidzwawo nemaatomu mana esilicon mumhando yetetrahedron. Ichi chimiro chinoita kuti crystal latticework yesilicon nitride igadzikane uye yakaoma kukanganisa. Semagumo, inoitwa kushandiswa senge gedhi-insulating layer pakugadzira yakakwirira erekitironi wheelchair transistors (HEMTs).

3. Ndezvipi zvakanakira SiNx pamusoro peSiO2?

Zviri nani zvakanyanya kugadzikana kwekupisa, kuoma kwakaoma, uye zvakaoma kunyora.

Mupi weSilicon Nitride Powder

TRUNNANO mutengesi we 3D Printing Materials ane pamusoro 12 makore ruzivo mu nano-kuvaka simba kuchengetedza uye nanotechnology kusimudzira. Inobvuma kubhadhara kuburikidza neCredit Card, T/T, West Union uye Paypal. Trunnano ichaendesa zvinhu kune vatengi mhiri kwemakungwa kuburikidza neFedEx, DHL, nemhepo, kana nomugungwa. Kana iwe uchida kuziva zvakawanda nezve si nitride, ndapota inzwa wakasununguka kutibata nesu uye kutumira kubvunza.